SVC-1200 Series

SVC-1200 Series

Ophthalmic, optical, defense lens, medical device, and metal decoration coating system (Medium)
Dia. Ø800 ~ 1350

Application Process

A compact mass-production lineup optimized for ophthalmic lenses and precision optical coating, with stable support for metal coating processes.

Application Fields Ophthalmic Coating
- AR and durability enhancement coating
- Ophthalmic lenses
- ZrO₂, SiO₂, etc.

Lens Coating
- High-precision optical coating for Vis/IR ranges
- Defense lenses, medical devices, etc.
- Ti₃O₅, Ta₂O₅, HfO₂, Nb₂O₅, MgF₂, SiO₂, Al₂O₃, etc.

Metal Coating
- Functional and decorative coating
- Various wafers, exterior/interior parts, accessories, etc.
- Ti, Cu, Al, Cr, Ag, Au, etc.
Deposition Method Electron Beam System / Ion Beam IAD
Resistance Heating System
Supports optical and metal thin-film processes through configurable E-Beam, resistance heating, and ion assist sources.
Electron Beam Source
Resistance Heating Source
Ion Beam Source(End-Hall Type)
Halogen Lamp
Micro Heater
High Vacuum Pumping System

Specifications

These are standard specifications and can be customized upon customer request.

Vacuum System
Chamber Dia. 800~1350mm 1 set
Roughing System (RP) 5,100liter/min (optimized capacity by chamber) 1 set
Roughing System (MBP) 1,435m3/hr (optimized capacity by chamber) 1 set
Turbo Molecular Pump 4,200liter/sec 2 set
PolyCold w/meissner trap For chamber 1 set
Valve System High Vac./ Low Vac./ Vent Valve 1 set
Sources
Electron Beam 10kVA 6~16pocket x 25cc 1~2 set
RF Ion Beam Source RF 25cm 1 set
or Ion Beam Source
(End-Hall Type)		 Max. output 4kW 1 set
Film Thickness Control
QCM XDC/K1 or IMC300 1 set
Measuring Sensor Six Sensor Head@6MHz 1 set
Vacuum Control
High Vacuum Penning Sensor 1 ea
Low Vacuum Pirani Sensor 2 ea
Auto Pressure Controller MFC for Oxygen 1 set
Substrate Heating System
Micro Heater 13.56kW 1 set
Halogen Heater 9~15 kW 1 set
Substrate Holder & Rotation System
Fixturing Guide SUS 1 set
Sector Dome 3 or 4 Sector 2 set
Rotation 0~25 RPM / Ferro Seal 1 set
Control System
PLC Control Rack 19” Rack 1 set
Process Control OPCON System 1 set
Weight
Chamber 3,000~5,000kg
Roughing System (RP / MBP) 370kg
Control Box 700kg
PolyCold 550kg
Electron Beam PS 380kg
Ion Beam PS 120kg
Electricity
Power 60~90kW 3ph 4P 50 or 60Hz (50mm2)
AVR 20kVA electronic type (220V 3ph)
Earth Class A (Below 4Ω)
Foot Print
3,500W x 5,100D x 2,900mm (Excluding space for Work & Chiller)
Others
Compressed Air 6kg.f/cm2 100LPM w/mist filter
Cooling Water 3kg.f/cm2 120LPM/ Inlet & Outlet
Gas Ar, O2 (99.99%)
Exhaust 3’ tapped hose to pump exhaust

Electron Beam System

High productivity / Uniform coating quality

Dome Fixturing System

Dome Fixturing System

Electron Beam Source

Electron Beam Source

Ion Beam Source

Ion Beam Source

Common Features

Full Automation

Process Control

Data Logging

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