HDC-1300 Series (SVC-1300 Series)

HDC-1300 Series
(SVC-1300 Series)

Ophthalmic, optical, defense lens, medical device, and metal decoration coating system (Large)
Dia. Ø800 ~ 1350

Application Process

A compact mass-production lineup optimized for ophthalmic lenses and precision optical coating, with stable support for metal coating processes.

Application Fields Ophthalmic Coating
- AR and durability enhancement coating
- Ophthalmic lenses
- ZrO₂, SiO₂, etc.

Lens Coating
- High-precision optical coating for Vis/IR ranges
- Defense lenses, medical devices, etc.
- Ti₃O₅, Ta₂O₅, HfO₂, Nb₂O₅, MgF₂, SiO₂, Al₂O₃, etc.

Metal Coating
- Functional and decorative coating
- Various wafers, exterior/interior parts, accessories, etc.
- Ti, Cu, Al, Cr, Ag, Au, etc.
Deposition Method Electron Beam System / Ion Beam IAD
Resistance Heating System
Supports optical and metal thin-film processes through configurable E-Beam, resistance heating, and ion assist sources.
Electron Beam Source
Resistance Heating Source
Ion Beam Source(End-Hall Type)
Halogen Lamp
Micro Heater
High Vacuum Pumping System

Specifications

These are standard specifications and can be customized upon customer request.

Vacuum System
Chamber Dia. 800~1350mm 1 set
Roughing System (RP) 5,100liter/min (optimized capacity by chamber) 1 set
Roughing System (MBP) 1,435m3/hr (optimized capacity by chamber) 1 set
Turbo Molecular Pump 4,200liter/sec 2 set
PolyCold w/meissner trap For chamber 1 set
Valve System High Vac./ Low Vac./ Vent Valve 1 set
Sources
Electron Beam 10kVA 6~16pocket x 25cc 1~2 set
RF Ion Beam Source RF 25cm 1 set
or Ion Beam Source
(End-Hall Type)		 Max. output 4kW 1 set
Film Thickness Control
QCM XDC/K1 or IMC300 1 set
Measuring Sensor Six Sensor Head@6MHz 1 set
Vacuum Control
High Vacuum Penning Sensor 1 ea
Low Vacuum Pirani Sensor 2 ea
Auto Pressure Controller MFC for Oxygen 1 set
Substrate Heating System
Micro Heater 13.56kW 1 set
Halogen Heater 9~15 kW 1 set
Substrate Holder & Rotation System
Fixturing Guide SUS 1 set
Sector Dome 3 or 4 Sector 2 set
Rotation 0~25 RPM / Ferro Seal 1 set
Control System
PLC Control Rack 19” Rack 1 set
Process Control FilmMatrix System 1 set
Weight
Chamber 3,000~5,000kg
Roughing System (RP / MBP) 370kg
Control Box 700kg
PolyCold 550kg
Electron Beam PS 380kg
Ion Beam PS 120kg
Electricity
Power 60~90kW 3ph 4P 50 or 60Hz (50mm2)
AVR 20kVA electronic type (220V 3ph)
Earth Class A (Below 4Ω)
Foot Print
3,500W x 5,100D x 2,900mm (Excluding space for Work & Chiller)
Others
Compressed Air 6kg.f/cm2 100LPM w/mist filter
Cooling Water 3kg.f/cm2 120LPM/ Inlet & Outlet
Gas Ar, O2 (99.99%)
Exhaust 3’ tapped hose to pump exhaust

Electron Beam System

High productivity / Uniform coating quality

Dome Fixturing System

Dome Fixturing System

Electron Beam Source

Electron Beam Source

Ion Beam Source

Ion Beam Source

Common Features

Full Automation

Full Automation

Process Control

Process Control

Data Logging

Data Logging
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