Dome Fixturing System
A mid-to-large mass-production lineup optimized for advanced optical coating, including camera lenses, telescopes, and defense-grade lenses.
| Application Fields | Precision Lens Coating - Camera lenses, telescopes, defense-grade lenses, etc. - High-precision optical coating for Vis/IR ranges - Ti₃O₅, Ta₂O₅, HfO₂, Nb₂O₅, MgF₂, SiO₂, Al₂O₃, etc. Molded Optics Mass Production - Smartphone lenses and molded optical parts - High-durability AR coating for mass production - Dense thin-film formation with RF Ion Source Ceramic Coating - Durable and functional ceramic thin films - High-hardness, wear-resistant, protective coating processes - ZrO₂, SiO₂, Al₂O₃, etc. |
|---|---|
| Deposition Method | Electron Beam System / Ion Beam IAD Resistance Heating System |
These are standard specifications and can be customized upon customer request.
| Chamber | Dia. 1,200~1,800mm | 1 set |
| Roughing System (RP) | 5,100liter/min (optimized capacity by chamber) | 1 set |
| Roughing System (MBP) | 1,435m3/hr (optimized capacity by chamber) | 1 set |
| Turbo Molecular Pump | 4,200liter/sec | 2 set |
| PolyCold w/meissner trap | For chamber | 1 set |
| Valve System | High Vac./ Low Vac./ Vent Valve | 1 set |
| Electron Beam | 10kVA 8~24pocket x 12cc | 1~2 set |
| RF Ion Beam Source | RF 25cm | 1 set |
| or Ion Beam Source (End-Hall Type) |
Max. output 4kW | 1 set |
| QCM | XDC/K1 or IMC300 | 1 set |
| Measuring Sensor | Six Sensor Head@6MHz | 1 set |
| High Vacuum | Penning Sensor | 1 ea |
| Low Vacuum | Pirani Sensor | 2 ea |
| Auto Pressure Controller | MFC for Oxygen | 1 set |
| Micro Heater | 13.56kW | 1 set |
| Halogen Heater | 12~24 kW | 1 set |
| Fixturing Guide | SUS | 1 set |
| Sector Dome | 3 or 4 Sector | 2 set |
| Rotation | 0~25 RPM / Ferro Seal | 1 set |
| PLC Control Rack | 19” Rack | 1 set |
| Process Control | OPCON System | 1 set |
| Chamber | 3,000~7,000kg |
| Roughing System (RP / MBP) | 370kg |
| Control Box | 700kg |
| PolyCold | 550kg |
| Electron Beam PS | 380kg |
| Ion Beam PS | 120kg |
| Power | 65~95kW 3ph 4P 50 or 60Hz (50mm2) |
| AVR | 20kVA electronic type (220V 3ph) |
| Earth | Class A (Below 4Ω) |
| 3,500W x 5,100D x 2,900mm (Excluding space for Work & Chiller) |
| Compressed Air | 6kg.f/cm2 100LPM w/mist filter |
| Cooling Water | 3kg.f/cm2 120LPM/ Inlet & Outlet |
| Gas | Ar, O2 (99.99%) |
| Exhaust | 3’ tapped hose to pump exhaust |
High productivity / Uniform coating quality
Dome Fixturing System
Electron Beam Source
Ion Beam Source
