Heat Treatment

Heat Treatment

Supports stable heat treatment processes tailored to material properties while reducing oxidation and contamination in a vacuum environment.

Application Process

Vacuum equipment supporting stable heat treatment while reducing oxidation and contamination according to material properties.

Application Fields Precision heat treatment in a high-vacuum environment to prevent oxidation on part and substrate surfaces

Internal stress relief, hardness improvement, and physical property enhancement for metals, ceramic structures, and related parts

Precise control of customized temperature profiles(recipes) according to product geometry and material properties
Process Method Custom Vacuum Heating System
Vacuum, heating, and temperature-control configurations can be customized by material properties and process goals.
Vacuum Controller
Heating Controller
High Vacuum Pumping System

Specifications

These are standard specifications and can be customized upon customer request.

Vacuum System
Chamber Dia. 600~2,800mm 1 set
Roughing System (RP) 5,100liter/min (optimized capacity by chamber) 1 set
Roughing System (MBP) 1,435m3/hr (optimized capacity by chamber) 1 set
Turbo Molecular Pump 4,200liter/sec 2 set
PolyCold w/meissner trap For chamber 1 set
Valve System High Vac./ Low Vac./ Vent Valve 1 set
Vacuum Control
High Vacuum Penning Sensor 1 ea
Low Vacuum Pirani Sensor 2 ea
Substrate Heating System
Halogen Heater 12~24 kW 1 set
Control System
PLC Control Rack 19” Rack 1 set
Process Control OPCON System 1 set
Weight
Chamber 7,500~15,000g
Roughing System (RP / MBP) 370kg
Control Box 700kg
Electricity
Power 95~135kW 3ph 4P 50 or 60Hz (50mm2)
AVR 20kVA electronic type (220V 3ph)
Earth Class A (Below 4Ω)
Foot Print
3,500W x 5,100D x 2,900mm (Excluding space for Work & Chiller)
Others
Compressed Air 6kg.f/cm2 100LPM w/mist filter
Cooling Water 3kg.f/cm2 120LPM/ Inlet & Outlet
Gas Ar, O2 (99.99%)
Exhaust 3’ tapped hose to pump exhaust

Equipment Photos

Equipment images showing the front view, open chamber, and rear configuration of the vacuum heat treatment system.

Front View

Front View

Open Chamber

Open Chamber

Rear View

Rear View

Common Features

Full Automation

Process Control

Data Logging