An all-in-one sputtering lineup for high-precision optical, interference color, and AR+AF hybrid processes based on reactive sputtering.
| Application Fields | High-Precision Optical Coating - High-performance multi-layer optical thin films and AR coating based on reactive sputtering - Display cover glass, camera lenses, and various optical components - Ti, Si, Nb, and more Interference Color Coating - Premium multi-color expression through controlled optical interference - Smartphone back covers, wearable devices, and home appliance exterior parts - Multi-target processes using N2 gas and other process gases AR+AF Hybrid Coating - Continuous AR+AF process support - Touch panels, mobile displays, and automotive display glass - Ti, Si, AF materials, and more |
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| Deposition Method | Sputter Cathode System Plasma System Resistance Heating System |
These are standard specifications and can be customized upon customer request.
| Chamber | Dia. 1,200~1,600mm | 1 set |
| Roughing System (RP) | 5,100liter/min (optimized capacity by chamber) | 1 set |
| Roughing System (MBP) | 1,435m3/hr (optimized capacity by chamber) | 1 set |
| Turbo Molecular Pump | 2,800liter/sec | 2 set |
| PolyCold w/meissner trap | For chamber | 1 set |
| Valve System | High Vac./ Low Vac./ Vent Valve | 1 set |
| Dual Rotary Cathode | Effective Height 400mm w/shutter | 1 set |
| Single Rotary Cathode | Effective Height 400mm w/shutter | 1 set |
| ICP Source | RF Power / Matcher | 1 set |
| Linear Ion Source | w/DC power supply | 1 set |
| Cathode Power Supply | DC 10kW (Metal) | 1 set |
| Bipolar 10kW (Si) | 1 set |
| Rotation | 0-80 rpm | 1 set |
| Fixture | Drum Fixture / Segmented Plates | 1 set |
| High Vacuum | Penning Sensor | 1 ea |
| Low Vacuum | Pirani Sensor | 2 ea |
| Auto Pressure Controller | MFC for Oxygen | 1 set |
| Heating Control | Micro Heater | 1 set |
| PLC Control | 19” Rack | 1 set |
| Process Control | OPCON | 1 set |
| Chamber | 4,000~7,000kg |
| Roughing System (RP / MBP) | 550kg |
| Control Box | 700kg |
| PolyCold | 550kg |
| Power Supply Rack | 600kg |
| Ion Beam PS | 200kg |
| Power | 75kW 3ph 4P 50 or 60Hz (50mm2) |
| AVR | 30kVA electronic type (380V 3ph) |
| Earth | Class C (below 100Ω – 22m2) |
| 4,400W x 5,200D x 2,600mm (excluding space for work & chiller) |
| Compressed Air | 6kg.f/cm2 100LPM w/mist separator |
| Cooling Water | 3kg.f/cm2 190LPM/ Inlet & Outlet |
| Gas | Ar, N2, O2, (99.99%) |
| Exhaust | 3’ tapped hose to pump exhaust |
