Coating Materials
We supply coating materials such as SiO2, TiO2, and ZrO2 according to process requirements. Suitable materials can be reviewed for optical films, protective films, and functional thin films.
Consumables and maintenance parts for vacuum coaters and vacuum equipment
Process stability and equipment uptime depend on the condition of consumables such as coating materials, source parts, sensors, oils, sealing parts, heaters, and fixtures. SY Vacuum supplies major consumables and replacement parts required for stable production and efficient maintenance.
We supply coating materials such as SiO2, TiO2, and ZrO2 according to process requirements. Suitable materials can be reviewed for optical films, protective films, and functional thin films.
Crucible liners, E-beam and I-beam filaments, and related source parts are available. Maintaining source condition helps improve deposition repeatability and equipment uptime.
RHS boats and W/Mo filaments for resistance-heating deposition processes are supplied. Replacement intervals can be managed according to process temperature and deposition load.
Crystal sensors and monitor glass for film-thickness monitoring are supplied. These are key consumables for deposition control, process repeatability, and quality traceability.
Vacuum oils for DP, RP, and MBP pumps and O-rings for vacuum sealing are available. These parts help reduce contamination and leakage while maintaining target vacuum levels.
Micro sheathed heaters, halogen heaters, DP heaters, and vacuum sensors such as Pirani, Penning, Convectron, and hot cathode types are supplied for reliable operation monitoring.
Liners, uniformity masks, shutters, domes, substrate holders, segment domes, flip-over jigs, and planetary baskets are supported for substrate handling and film-uniformity control.
MFCs, valves, electrical and electronic parts, and controllers required for operation and maintenance are supplied. Compatibility can be reviewed according to equipment model and process conditions.
