System Overhaul
We inspect the overall equipment condition and review aging parts, piping, wiring, moving sections, and safety elements so the system can return to stable operation.
Repair, inspection, overhaul, and retrofit service for stable operation of vacuum coating equipment
Vacuum coating equipment must keep the chamber, pumps, sources, fixtures, and control system working together reliably to maintain process quality. SY Vacuum provides services that help extend equipment value, from condition diagnosis and major component overhaul to process-purpose retrofit and control or monitoring system upgrades.
We inspect the overall equipment condition and review aging parts, piping, wiring, moving sections, and safety elements so the system can return to stable operation.
We support overhaul or replacement of major vacuum pumps such as DP, RP, and MBP after checking performance loss, contamination, oil leakage, noise, and pumping speed issues.
Fixtures, rotation structures, and holding methods can be improved according to product shape, substrate size, or production method to improve mounting, repeatability, and process uniformity.
Electron beam sources can be added or modified, and ion beam sources can be applied according to process goals to improve film quality, adhesion, and process flexibility.
Aging controls, operator screens, interlocks, alarms, and recipe operation functions can be improved to enhance usability, safety, and maintainability.
Thickness monitoring configurations, including OPM installation, can be reviewed to support deposition control, process repeatability, and quality traceability.
Pump, valve, and piping configurations can be reviewed according to chamber volume, target vacuum level, pump-down time, and process gas conditions to improve pumping performance.
After reviewing equipment condition and improvement goals, we organize the required work scope and support repair or retrofit direction and quotation review.
